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Predictive technology characterization, missing links between TCADand compact modeling
McAndrew, C.C.
Simulation of Semiconductor Processes and Devices, 2000. SISPAD 2000. 2000 International Conference on
Volume , Issue , 2000 Page(s):12 - 17
Digital Object Identifier   10.1109/SISPAD.2000.871195
Summary:Predictive modeling of components in IC manufacturing technologies is an essential part of coupled technology and circuit development. TCAD simulation is often viewed as the best method to generate predictive simulations; however, it has some limitations. Engineering experience, extrapolated technology requirements, and compact models all must be invoked in the provision of predictive circuit level technology data. This paper describes the techniques and information required for effective and efficient engineering predictions of technology capability, including statistical variations, and notes deficiencies (and therefore opportunities) in the TCAD simulations that underlie compact modeling for predictive technology characterization

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